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Details for HMDS
| 111Category: | Intermediates |
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| CAS NO: | 999-97-3 | ||
| EC NO: | 213-668-5 | ||
| Molecular Formula: | C6H19NSi2 | ||
| Molecular Weight: | 161.39 | ||
| Specification: | |||
| InChI: | InChI=1/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3 | ||
| Synonyms: | HMDS;Hexamethyldisilazane;DYNASYLAN HMDS;Bis(trimethylsilyl)amine;1,1,1,3,3,3,-HEXAMETHYLDISILA-; | ||
| Molecular Structure: |
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